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1

Roll-to-roll sputtering of indium tin oxide layers onto ultrathin flexible glass

Fahland, Matthias, Zywitzki, Olaf, Modes, Thomas, Vondkar, Komal, Werner, Torsten, Ottermann, Clemens, Berendt, Markus, Pollack, Gerd

Journal:

Thin Solid Films

Year:

2019

Language:

english

File:

PDF, 937 KB

english, 2019

2

Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications

Barth, Stephan, Bartzsch, Hagen, Glöß, Daniel, Frach, Peter, Modes, Thomas, Zywitzki, Olaf, Suchaneck, Gunnar, Gerlach, Gerald

Journal:

Microsystem Technologies

Year:

2016

Language:

english

File:

PDF, 1.21 MB

english, 2016

3

Plasma-activated high rate evaporation using a low voltage electron beam system

S. Schiller, G. Hoetzsch, M. Neumann, H. Morgner, O. Zywitzki

Journal:

Surface and Coatings Technology

Year:

1994

Language:

english

File:

PDF, 1.07 MB

english, 1994

4

Activation of CdTe-based thin films with zinc chloride and tetrachlorozincates

Drost, C., Siepchen, B., Krishnakumar, V., Späth, B., Kraft, C., Modes, T., Zywitzki, O.

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 948 KB

english, 2015

5

New coatings on metal sheets and strips produced using EB PVD technologies

S. Schiller, Chr. Metzner, O. Zywitzki

Journal:

Surface and Coatings Technology

Year:

2000

Language:

english

File:

PDF, 550 KB

english, 2000

6

Effect of plasma activation on the phase transformations of aluminum oxide

O. Zywitzki, G. Hoetzsch

Journal:

Surface and Coatings Technology

Year:

1995

Language:

english

File:

PDF, 1.35 MB

english, 1995

7

Thin film CdTe solar cells by close spaced sublimation: Recent results from pilot line

Siepchen, B., Drost, C., Späth, B., Krishnakumar, V., Richter, H., Harr, M., Bossert, S., Grimm, M., Häfner, K., Modes, T., Zywitzki, O., Morgner, H.

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 889 KB

english, 2013

8

Effect of plasma activation on the phase transformations of aluminum oxide

Journal:

Surface and Coatings Technology

Year:

1995

Language:

english

File:

PDF, 1.35 MB

english, 1995

9

Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays

Barth, Stephan, Derenko, Susan, Bartzsch, Hagen, Zywitzki, Olaf, Modes, Thomas, Patrovsky, Fabian, Fiehler, Vera, Uhlig, Tino, Frach, Peter, Eng, Lukas M.

Journal:

Thin Solid Films

Year:

2019

Language:

english

File:

PDF, 9.66 MB

english, 2019

10

Rational Development of Cobalt β-Ketoiminate Complexes: Alternative Precursors for Vapor-Phase Deposition of Spinel Cobalt Oxide Photoelectrodes

junge Puring, Kai, Zywitzki, Dennis, Taffa, Dereje H., Rogalla, Detlef, Winter, Manuela, Wark, Michael, Devi, Anjana

Journal:

Inorganic Chemistry

Year:

2018

Language:

english

File:

PDF, 3.35 MB

english, 2018

11

High Rate Deposition of Nanofunctionalized Transparent Coatings on Metal and Glass Substrates by Hollow Cathode Arc Activated Reactive Evaporation

Henry Morgner, Christoph Metzner, Olaf Zywitzki

Journal:

Plasma Processes and Polymers

Year:

2007

Language:

english

File:

PDF, 290 KB

english, 2007

12

[IEEE 2014 IEEE International Ultrasonics Symposium (IUS) - Chicago, IL, USA (2014.9.3-2014.9.6)] 2014 IEEE International Ultrasonics Symposium - Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1−XN films deposited by pulsed magnetron sputtering

Barth, Stephan, Bartzsch, Hagen, Gloss, Daniel, Frach, Peter, Zywitzki, Olaf, Herzog, Thomas, Walter, Susan, Heuer, Henning

Year:

2014

Language:

english

File:

PDF, 800 KB

english, 2014

13

Effect of structure and morphology on photocatalytic properties of TiO2 layers

O. Zywitzki, T. Modes, P. Frach, D. Glöss

Journal:

Surface and Coatings Technology

Year:

2008

Language:

english

File:

PDF, 799 KB

english, 2008

14

Zr–Nb–N hard coatings deposited by high power pulsed sputtering using different pulse modes

H. Klostermann, F. Fietzke, R. Labitzke, T. Modes, O. Zywitzki

Journal:

Surface and Coatings Technology

Year:

2009

Language:

english

File:

PDF, 724 KB

english, 2009

15

Rekonstruktion von Barockspiegeln des Historischen Grünen Gewölbes im Dresdener Schloss

Wolfgang Neodon, Olaf Zywitzki, Torsten Kopte

Journal:

Vakuum in Forschung und Praxis

Year:

2007

File:

PDF, 581 KB

2007

16

Effect of the substrate temperature on the structure and properties of Al2O3 layers reactively deposited by pulsed magnetron sputtering

O. Zywitzki, G. Hoetzsch, F. Fietzke, K. Goedicke

Journal:

Surface and Coatings Technology

Year:

1996

Language:

english

File:

PDF, 685 KB

english, 1996

17

Deposition of photocatalytic TiO2 layers by pulse magnetron sputtering and by plasma-activated evaporation

P. Frach, D. Glöß, Chr. Metzner, T. Modes, B. Scheffel, O. Zywitzki

Journal:

Year:

2006

Language:

english

File:

PDF, 176 KB

english, 2006

18

12% efficient CdTe/CdS thin film solar cells deposited by low-temperature close space sublimation

J. Schaffner, M. Motzko, A. Tueschen, A. Swirschuk, H. Schimper, A. Klein, T. Modes, O. Zywitzki, W. Jaegermann

Year:

2011

Language:

english

File:

PDF, 2.60 MB

english, 2011

19

Structure and properties of crystalline titanium oxide layers deposited by reactive pulse magnetron sputtering

Journal:

Surface and Coatings Technology

Year:

2004

Language:

english

File:

PDF, 1.32 MB

english, 2004

20

Characterisation of baroque tin amalgam mirrors of the historical Green Vault in Dresden

O. Zywitzki, W. Nedon, T. Kopte, T. Modes

Journal:

Applied Physics A: Materials Science & Processing

Year:

2008

Language:

english

File:

PDF, 398 KB

english, 2008

21

Photocatalytic titanium dioxide thin films prepared by reactive pulse magnetron sputtering at low temperature

D. Glöß, P. Frach, O. Zywitzki, T. Modes, S. Klinkenberg, C. Gottfried

Journal:

Surface and Coatings Technology

Year:

2005

Language:

english

File:

PDF, 509 KB

english, 2005

22

Nanocomposite oxide and nitride hard coatings produced by pulse magnetron sputtering

H. Klostermann, B. Böcher, F. Fietzke, T. Modes, O. Zywitzki

Journal:

Surface and Coatings Technology

Year:

2005

Language:

english

File:

PDF, 227 KB

english, 2005

23

Correlation between structure and properties of reactively deposited Al2O3 coatings by pulsed magnetron sputtering

O. Zywitzki, G. Hoetzsch

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 740 KB

english, 1997

24

Influence of process parameters on the structure and the properties of ZrO2 coatings deposited by reactive pulsed magnetron sputtering (PMS)

Klaus Goedicke, Jörn-Steffen Liebig, Olaf Zywitzki, Hagen Sahm

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 347 KB

english, 2000

25

High Surface Area, Amorphous Titania with Reactive Ti 3+ through Photo-assisted Synthesis Method for Photocatalytic H 2 Generation

Zywitzki, Dennis, Jing, Hangkun, Tueysuez, Harun, Chan, Candace K.

Journal:

Journal of Materials Chemistry A

Year:

2017

Language:

english

File:

PDF, 1.90 MB

english, 2017

26

Structure and Properties of magnetron-sputtered Manganese Ferrite Films

Fietzke, Fred, Zywitzki, Olaf

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 2.99 MB

english, 2017

27

Tuning Coordination Geometry of Nickel Ketoiminates and Its Influence on Thermal Characteristics for Chemical Vapor Deposition of Nanostructured NiO Electrocatalysts

Zywitzki, Dennis, Taffa, Dereje H., Lamkowski, Laura, Winter, Manuela, Rogalla, Detlef, Wark, Michael, Devi, Anjana

Journal:

Inorganic Chemistry

Year:

2020

File:

PDF, 2.93 MB

2020

28

Comparison of structure and properties of SiOx coatings deposited by reactive pulsed magnetron sputtering (PMS) and by hollow cathode activated EB evaporation (HAD)

Olaf Zywitzki, Hagen Sahm, Mario Krug, Henry Morgner, Manfred Neumann

Journal:

Surface and Coatings Technology

Year:

2000

Language:

english

File:

PDF, 492 KB

english, 2000

29

Close spaced sublimation deposition of CdTe layers with process gas oxygen for thin film solar cells

Krishnakumar, V., Späth, B., Drost, C., Kraft, C., Siepchen, B., Delahoy, A., Tan, X., Chin, K., Peng, S., Hirsch, D., Zywitzki, O., Modes, T., Morgner, H.

Journal:

Thin Solid Films

Year:

2016

Language:

english

File:

PDF, 1.32 MB

english, 2016

30

Influence of coating parameters on the structure and properties of Al2O3 layers reactively deposited by means of pulsed magnetron sputtering

O. Zywitzki, G. Hoetzsch

Journal:

Surface and Coatings Technology

Year:

1996

Language:

english

File:

PDF, 853 KB

english, 1996

31

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Influence of process parameters on properties of piezoelectric AlN and AlScN thin films for sensor and energy harvesting applications

Sánchez-Rojas, José Luis, Brama, Riccardo, Barth, Stephan, Bartzsch, Hagen, Gloess, Daniel, Frach, Peter, Modes, Thomas, Zywitzki, Olaf, Suchaneck, Gunnar, Gerlach, Gerald

Year:

2015

Language:

english

File:

PDF, 540 KB

english, 2015

32

Porous silicon thin films as anodes for lithium ion batteries deposited by co-evaporation of silicon and zinc

Saager, Stefan, Scheffel, Bert, Zywitzki, Olaf, Modes, Thomas, Piwko, Markus, Doerfler, Susanne, Althues, Holger, Metzner, Christoph

Journal:

Surface and Coatings Technology

Year:

2018

Language:

english

File:

PDF, 1.57 MB

english, 2018

33

Transparentes leitfähiges TiO2:Nb – ein TCO-Material der Zukunft? : Neue TCO Materialien für die transparente Elektronik und Photovoltaik

Manuela Junghähnel, Torsten Kopte, Olaf Zywitzki

Journal:

Vakuum in Forschung und Praxis

Year:

2011

Language:

german

File:

PDF, 958 KB

german, 2011

34

Structure and properties of titanium oxide layers deposited by reactive plasma activated electron beam evaporation

T. Modes, B. Scheffel, Chr. Metzner, O. Zywitzki, E. Reinhold

Journal:

Surface and Coatings Technology

Year:

2005

Language:

english

File:

PDF, 123 KB

english, 2005

35

Plasma-assisted reactive high-rate vapor deposition of yttria-stabilized zirconia using electron beam evaporation and spotless vacuum arc

Scheffel, Bert, Zywitzki, Olaf, Metzner, Christoph

Journal:

Surface and Coatings Technology

Year:

2017

Language:

english

File:

PDF, 1.28 MB

english, 2017

36

Structure of superhard nanocrystalline (Ti,Al)N layers deposited by reactive pulsed magnetron sputtering

O. Zywitzki, H. Klostermann, F. Fietzke, T. Modes

Journal:

Surface and Coatings Technology

Year:

2006

Language:

english

File:

PDF, 415 KB

english, 2006

37

Structure and properties of crystalline titanium oxide layers deposited by reactive pulse magnetron sputtering

O. Zywitzki, T. Modes, H. Sahm, P. Frach, K. Goedicke, D. Glöß

Journal:

Surface and Coatings Technology

Year:

2004

Language:

english

File:

PDF, 1.32 MB

english, 2004

38

Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

Zywitzki, Olaf, Modes, Thomas, Barth, Stephan, Bartzsch, Hagen, Frach, Peter

Journal:

Surface and Coatings Technology

Year:

2016

Language:

english

File:

PDF, 1.60 MB

english, 2016

39

Correction: High surface area, amorphous titania with reactive Ti 3+ through a photo-assisted synthesis method for photocatalytic H 2 generation

Zywitzki, Dennis, Jing, Hangkun, Tüysüz, Harun, Chan, Candace K.

Journal:

Journal of Materials Chemistry A

Year:

2017

Language:

english

File:

PDF, 159 KB

english, 2017

40

Structure and properties of Al2O3 layers deposited by plasma activated electron beam evaporation

O. Zywitzki, K. Goedicke, H. Morgner

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.25 MB

english, 2002

41

Effect of chlorine activation treatment on electron beam induced current signal distribution of cadmium telluride thin film solar cells

Zywitzki, Olaf, Modes, Thomas, Morgner, Henry, Metzner, Christoph, Siepchen, Bastian, Späth, Bettina, Drost, Christian, Krishnakumar, Velappan, Frauenstein, Sven

Journal:

Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 822 KB

english, 2013

42

Rod cathode arc-activated deposition (RAD) — a new plasma-activated electron beam PVD process

B. Scheffel, Chr. Metzner, K. Goedicke, J.-P. Heinss, O. Zywitzki

Journal:

Surface and Coatings Technology

Year:

1999

Language:

english

File:

PDF, 660 KB

english, 1999

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